Nupure CorporationNupure Corporation

ELIMINATOR® CG
Room Temperature Purifier for Inert Gases 

 

Model 600 CG
FEATURES

 

  • Outlet purity guarantee to < 0.5 ppb1
  • Removes all hydrocarbons, including CH4
  • No heaters or power required
  • Room-temperature operation
  • 316L SS (<10 Ra EP) vessel
  • Factory regenerable for up 10 year life
  • Field regenerable for up to 10 year life
  • Improved process equipment perfomance
  • Optional built-in 0.003 m filter (PF type)
  • High Flow - up to 2500 slpm
  • Lowest cost (initial and operating)

APPLICATIONS

NuPure's  Eliminator® CG Gas Purifier is designed to purify Inert Gases (Nitrogen or Noble Gases) to state-of-the-art purity, using a patented design and process. It removes all hydrocarbons (including methane), and all other gaseous impurities found in Inert gases, to PPT levels using room temperature operation. The Eliminator® CG is ideal for critical process and purging applications.  

The NuPure®  Eliminator® CG contains a new patented combination of catalyst and metal getter. It contains no hydrocarbon or sulfur compounds. The  Eliminator® CG Purifier incorporates a new unique internal filter design combined with a short purifier geometry, allowing a very high flow combined with a very low pressure drop.  

The  Eliminator® CG gas purifiers come in standard size ranges from 0 to 2500 slpm. The use of optional factory-installed inlet isolation valve (shown in photo) is recommended for elimination of possible operator error during installation. Optional high Cv valves are available to ensure a low system pressure drop.

 

        • Zero-Hydrocarbon UHP Inert Gas Purge
        • APIMS Zero and Calibration
        • Semiconductor Process Equipment
        • Gas Cylinder Cabinets
        • Gas Analyzer Carts
        • Analytical Industry
        • Research and Development

 

IMPURITIES REMOVED1

Gas

Version

H2O

O2

CO2

CO

H2

NMHCs

CH4

Particles

N2

 PF or XL 

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

 0.003 m or 1 m 

Noble 

 PF or XL

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

 0.003 m or 1 m 
1 - Based on a VLSI Grade Liquid Gas source. Nitrogen not removed from noble gases.. Removal of nitrogen can be accomplished using heated getter purifiers. See brochures for NuPure®   PF Series™ and Omni Series Gas Purifiers.

Dimensional and Performance Specifications

Dimensional and Performance Specifications Dimensional and Performance Specifications Dimensional and Performance Specifications
Dimensional and Performance Specifications Dimensional and Performance Specifications Dimensional and Performance Specifications

 Purifier Model

A
in  (mm)
B
in  (mm)
C
in  (mm)

Particle Filtration Level

Max Flow

Part Number

Mini CG

4.5   (114)

2.7   (69) 1.0   (25)

0.003 m1 or 1 m

4 slpm 

00040-CG-VR4-PF1 or XL
100 CG 4.5   (114) 2.7   (69) 1.5   (38)

0.003 m1 or 1 m

12 slpm 

00100-CG-VR4-PF1 or XL
200 CG

6.0  (152)

4.2  (107) 1.5   (38) 0.003 m1 or 1 m

25 slpm 

00200-CG-VR4-PF1 or XL
500 CG

7.9  (202)

6.1  (156) 2.0   (51) 0.003 m1 or 1 m

50 slpm 

00500-CG-VR4-PF1 or XL
600 CG

8.2  (208)

6.5  (167) 2.0   (51) 0.003 m1 or 1 m

75 slpm

00600-CG-VR4-PF11 or XL
1000 CG2

12.9  (328)

11.1  (286) 2.0   (51) 0.003 m1 or 1 m 125 slpm  01000-CG-VR4-PF1 or XL
1200 CG

7.9  (202)

6.1  (156) 3.0   (76) 0.003 m1 or 1 m

150 slpm 

01200-CG-VR4-PF1 or XL
2000 CG 17.7 (449) 15.9   (402) 2.5   (63) 0.003 m1 or 1 m 250 slpm  02000-CG-VR4-PF1 or XL
3000 CG 17.3  (439) 15.5   (394) 3.0   (76) 0.003 m1 or 1 m 300 slpm  03000-CG-VR4-PF1 or XL
3000 CG 17.7   (449) 15.6   (396) 3.0   (76) 0.003 m1 or 1 m 500 slpm 03000-CG-VR2-PF1 or XL
5000 CG3 25.3  (643) 23.2   (590) 3.0   (76) 0.003 m1 or 1 m 850 slpm 05000-CG-VR2-PF1 or XL
10000 CG3 35.9  (913) 33.8   (860) 4.0  (101) 0.003 m1 or 1 m 1200 slpm 10000-CG-VR2-PF1 or XL
15000 CG3 35.9  (913) 33.8   (860) 5.0  (127) 0.003 m1 or 1 m 1800 slpm 15000-CG-VR2-PF1 or XL
25000 CG3 35.9  (913) 33.8   (860) 6.0  (152) 0.003 m1 or 1 m 2500 slpm 25000-CG-VR2-PF1 or XL

Maximum Pressure       

250 psig (USA) / 9.9 kg/cm2G (Japan)

Materials     

316L SS (< 10Ra EP)

Operating Temperature 

Room Temperature

Fittings    

1/4" MVCR4 available on sizes Mini-3000

Leak Rate

< 2 x 10-9 atm cc/sec He                   1/2" MVCR4 available on sizes 600-25000

1 - Sub-micron filtration only with PF version.

2 - For model 1000 dimension A have  changed from 12.1 inches to 12.9 inches, dimension B has changed from 10.3 inches to 11.1 inches.

3 - For models 5000 and larger - the printed dimensions are subject to future change. Please check with factory prior ordering.

4 - VCR-compatible fittings standard. VCR is Registered Trademark of Cajon Corp. Special fittings on request.


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106B Schneider Road, Ottawa ON  K2K 1Y2 Canada
Tel 1-613-836-0336 Fax 1-613-836-0297
E-mail: sales@nupure.com
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