• Ultra fine filtration down to 0.003µm
• Particle retention up to 99.9999999% (9 log)
• Flow rates up to 360 slpm (at 5 atm operating)
• Inert and corrosive gas applications
• No shedding
• 316L SS VAR (<5 Ra EP) surface finish
• Hastelloy C-22 housing for corrosive gases
• Bakeable 450^o C (SS) / 200^o C (Ceramic)
• Operation to 450^o C (SS) / 120^o C (Ceramic)
• High Pressure Rating (to 3000 psig)
• Leak rate tested to < 2 x 10^-10 atm cc/sec He

• Semiconductor Industry
• Zero for Particle Testing
• Gas Cabinets
• Valve Manifold Boxes
• Process Tool Gas Panels
• Research and Development
• Specialty Gas Mixing

Ceramic Filter: NuPure’s C3 Series Ceramic Gas Filters employ tube-type ceramic filter media that features 20% less surface area than competitors hexagonal multichannel media. As a result these filters demonstrate excellent out-gassing characteristics and extremely rapid gas displacement. The use of rigid ceramic media eliminates particle shedding during pressure or flow fluctuations. Three layer construction, each layer with successively smaller pores, provides 99.9999999% retention efficiency at removing particles down to .003µm in size, while maintaining good flow characteristics.

C2 Ceramic Filter: NuPure’s C2 Series Ceramic Gas filters utilize a new two-layer tube type ceramic media. The C2 combines exceptionally low pressure drop at high flows with a 99.99999% particle retention efficiency down to 0.003µm, making it especially suitable for high-flow applications.

SS All-Metal Filter: The SS Series Gas Filter features all 316L stainless steel construction. The all metal design of this filter allows for operation at temperatures as high as 450^o C. This high performance gas filter combines excellent particle removal efficiency, low out-gassing and low pressure drop in an extremely compact design. Factory bake-out is standard.

All the above series are available with either MVCR fittings, Swagelok type, or Surface Mount interface - (per SEMI 2787.1, .2, .3, .4, .5). The Surface Mount configurations are available in both the 1.5" and 1.125" sizes. 

In today’s demanding semiconductor industry, there is a greater need for the removal of particles suspended in the gas phase to increase product yield and protect expensive tooling. In addition to the extensive gas purification product line, NuPure offers a broad selection of both Ceramic and Metal particle filters giving the semiconductor industry and process equipment manufacturers a total solution to the delivery of Ultra-Clean gases to the point-of-use.

NuPure® Gas Particle Filters

Typical Perfomance and Dimensional Specifications

120 @ 7 LRV

5.75"

1.67"

360 @ 7 LRV

11.18"

1.67"

10 @ 6 LRV

2.56"

1.06"

30 @ 6 LRV

3.31"

1.18"

130 @ 6 LRV

5.0"

1.06"

Contact Factory

10,40, 80

-

-

Contact Factory

10,40, 80, 120

-

-