Ultra High Purity Gas Purification
Ultra High Purity Gas Purification |
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Point of Use Purifier (Includes XL series) |
The
UltraPure™ PF Series™ purifier/filter combine the best
technology in particle filtration, with the best technology for gas purification.
This one-stage purifier/filter combination is designed as a cost-saving
replacement for the conventional in-line purifier - filter installation.
Most PF Series™ utilizes advanced metal getter technology and a
0.003 µm Nanometal™ sintered stainless steel filter media. The standard
range (0 - 100 slpm) offers sub-ppb impurity removal in all inert gases,
hydrogen, hydrides, acid gases, oxygen and more. More
Info |
NEW! Room Temperature Purifier |
The
NuPure® Eliminator®CA gas purifiers reduce
gaseous impurities (H2O, O2, CO, CO2,
H2, NMHC's) to new low levels at room temperature operation
from any inert gas - Nitrogen, Argon, Helium, Krypton, Neon, and Xenon.
The Catalyst/Absorber (CA) type purifier offers critical impurity removal
to <1 ppb. Standard range 0-2000 slpm is available with integral particle
filter and includes an isolation valve for ease of installation.
Factory regeneration of all units is available. More
Info |
NEW! Room Temperature Purifier For Inert Gases |
NuPure's
Eliminator® CG Gas Purifier is designed to purify Inert Gases (Nitrogen
or Noble Gases) to state-of-the-art purity, using a patented
design and process. It removes all hydrocarbons (including
methane), and all other gaseous impurities found in Inert gases, to PPT
levels using room temperature operation. The Eliminator® CG is ideal
for critical process and purging applications. More
Info |
| NuPure®
Eliminator®CAG Room Temperature Purifier |
The NuPure® Eliminator®CAG uses a new, patented
Catalyst/Absorber/Getter (CAG) purifier technology, which guarantees
removal to < 0.5 ppb per impurity including hydrocarbons. Standard range
0-300 slpm with the XL version is especially suitable for high flow operations.
Available with integral particle filter and an isolation valve for ease
of installation. Factory regeneration of all units is available. The
CAG type purifiers can be regenerated without need for hydrogen! More
Info |
| Ceramic and Metal Gas Particle Filters | In
addition to the extensive gas purification product line, NuPure offers
a broad selection of both Ceramic and Metal particle filters. Ultra
fine filtration (down to 0.003µm) gives the semiconductor industry and
process equipment manufacturers a total solution to the delivery of Ultra-Clean
gases to the point-of-use. More Info |
| Omni™ Point-of-Use Gas Purifier | The
NuPure® Omni™ series of Point-of-Use purifiers incorporate
either the UltraPure™ PF Series™ purifier or the UltraPure™
XL Series purifier (as detailed above), heater, insulation and electronics
assembly into an easy-to-use, compact unit. The certified temperature
control unit and electronics are designed for simple operation, reliability
and safety. |
| Omni™ / Titan™ Gas Purifier POU Systems | The
Omni™ and Titan™ include all the necessary components
to make this an easy to install, complete POU gas purification system.
Each unit includes air operated or manual inlet and outlet valves, 0.003
µm ceramic or metal particle filter, full electronics with alarm and auto-shutdown
(for heated operation) and <10 Ra wetted surface finish tubing. All welding
and assembly is performed in a class 10 environment. The Saturn™
and Titan™
are available for most process gases, including Nitrogen, Argon, Hydrogen,
Nitrous Oxide, Silane, Ammonia, Methane, CF4, C2F6,
CHF3, and more, with impurity removal to sub-ppb levels.
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| Bulk Purifier Vessel Replacement/Refurbish | Capability
to Replace/Refurbish all purifier vessels for the installed base of UltraPure™
Systems Inc., bulk gas purification systems. As a licenced manufacturer
of the UltraPure™ technology these vessels are guaranteed to meet
original performance and dimensional specifications. Range: 3,500 XL -
50,000 XL systems. |
| High
Flow Gas Purifiers and Component Sets (HFCS) |
These HFCS allow for customers to build Gas Purifier Systems for
flows ranging from 30 - 2250 slpm, for most process gases including Nitrogen,
Argon, Helium, Hydrogen and Oxygen. Each easy-to-assemble component set
includes purifier, filter, heater(s) and TCU electronics assembly which
is designed for simple operation and reliability. These units offer a
very cost-effective alternative to a full turnkey bulk gas system. (Tubing
and Fittings are extra) |
NEW! Room Temperature Purifier For Optics Purge Gases |
NuPure's
Optics™ OA Gas Purifiers is designed to purify CDA, Inerts (e.g. Nitrogen
or Helium), oxygen, and oxygen/Inert gas mixtures.It reduces hydrocarbons
and other gaseous impurities commonly found in nitrogen and CDA to PPT
levels using room temperature operation. The Optics™ OA is ideally
suited to purifying gases for lens purging. More
Info |
NEW! Room Temperature Purifier For Optics Purge Gases |
The
NuPure® Optics™ OAG contains a new proprietary combination of non-reactive
inorganic absorber media and oxygen-stabilized metal getter (patent pending).
It removes all hydrocarbons (including methane) and other
gaseous impurities commonly found in purge gases to PPT levels using room
temperature operation. The Optics™ OAG is ideal for the most
critical applications in lens purging. More
Info |
 106B Schneider Road, Ottawa ON K2K 1Y2 Canada Tel 1-613-836-0336 Fax 1-613-836-0297 E-mail: sales@nupure.com 1997 - 2010 All pages on this site Copyright of NuPure Corporation Nupure® and Eliminator® are registered trademarks of Nupure Corporation |