Nupure CorporationNupure Corporation

UltraPure™ High Flow Purifier Vessels
and Component Sets

UltraPure™ High Flow Purifier Vessels FEATURES
  • Cost-effective alternative to a turnkey system

  • Easy-to-assemble 

  • Sub-ppb removal of impurities from Inert Gases, Hydrogen, Acid Gases, and Oxygen

  • Factory tested temperature control unit (TCU) assembly, designed for simple operation and reliability

  • 316L stainless steel electropolished wetted surface finish (optional < 15Ra)

  • In-Situ regeneration and bakeable to 450o C

APPLICATIONS

 
  • SemiConductor Industry
       
  • High Purity Welding
       
  • Fab Construction/Purge Gases
       
  • Bottle Filling (HP Version)
       
  • Industrial/Metal Processing
UltraPure™ High Flow Purifier Vessels and Component Sets allow for the simple fabrication of Gas Purifier Systems for flows ranging from 30 - 4000 slpm, for most Bulk Gases including Argon, Helium, Nitrogen, Hydrogen and Oxygen. The UltraPure™ High Flow Purifier vessels will reduce gaseous impurities (as listed below), to sub-ppb levels.

High Flow Gas Purifiers are available in the UltraPure™ XL series for the Electronics Industry (< 1 ppb outlet) and an industrial version (< 10 ppb outlet)

High pressure purifiers (max 3000 psig) available upon request, ideal for gas bottle filling plants and other similar high pressure applications.

 


LISTING OF GASES PURIFIED / FILTERED
Impurities Removed
H
2O,O2,CO,CO2,H21(N2,CH4)2
Impurities Removed
H
2O,O2,CO2,CO(N2)3
Impurities Removed
H
2O
Impurities Removed
H
2O,CO2(H2CO,CH4)4
Argon
Helium
Nitrogen
Hydrogen
Argon/Hyrdogen
Nitrogen/Hydrogen
Ammonia
Silane
Hydrogen Chloride
Oyxgen
Air
Nitrous Oxide
1 - Only with purchase of - H model.
2 - Additional impurities removed from Ar, He & N2 only, using heated getter.
3 - Nitrogen and Methane removed from Hydrogen, Argon/Hydrogen and Nitrogen/Hydrogen, using heated getter.
4 - Only with purchase of optional heated catalyst

Product Specifications

 
Model 3,500 - 10,000



Model 20,000 - 50,000
diagram

Model
A inches
B inches
C inches
Fittings inches
Average Flows (slpm)1
1 year lifetime (removal of impurities per chart page 1)
Max Flow (slpm) @ 150 psig Heated
Max Flow (slpm) @ 150 psig Room Temp
3500
13.5"
11.0"
3.5"
1/2
30
160
280
5000
32.4"
30.4"
3.0"
1/2
45
225
395
10,000
47.0"
45.0"
4.0"
1/2
90
450
790
20,000
63.0"
66.0"
5.0"
1/2
180
900
1,575
30,000
63.0"
66.0"
6.0"
1/2
270
1,350
2,365
50,000
63.0"
66.0"
7.5"
3/4
450
2,250
4,000

Maximum Pressure 250 psig (USA)/9.9 kg/cm2G (Japan) Materials 316L S.S. (< 15 Ra Max)
Operating Temperature Room Temperature or 375 - 450oC Fittings MVCR
Leak Rate < 2 x 10-10 atm cc/sec He Gas Inlet VLSI grade (99.9995% nominal)1
1 - Lifetime is inversely proportional to the total inlet impurity level and to the average flow. Lifetime for H2O/O2 removal only using getter purifiers is approx. 4 years at the stated flows / inlet gas. Room temperature getter purifiers require periodic regeneration to achieve this total lifetime.

Optional Accessories
  • UHP High Flow Gas Valves
  • 0.003 Ám Ceramic or Metal Particle Filter
  • Pressure Transducer with digital display
  • High Pressure Vessels (ASME Code)
  • Heat Exchanger
  • External Band Heater (See note below)
  • Thermal Insulation Blanket
  • High Flow Mass Flow Meters
  • TCU Electronics Assembly
  • APIMS testing for all impurities
Note: For regeneration and for applications requiring removal of all impurities, an external band heater and TCU electronics assembly is required.

 

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106B Schneider Road, Ottawa ON  K2K 1Y2 Canada
Tel 1- 613-836-0336 Fax 1- 613-836-0297
E-mail:
sales@nupure.com
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