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Optics™ OA
Room Temperature Purifier for Optics Purge Gases 

 

Nupure Optics model 600 OA FEATURES

 

  • Removal of impurities to < 0.5 ppb1

  • No heaters or power required

  • Room-temperature operation

  • 316L SS (<10 Ra EP) vessel

  • Factory regenerable for up 10 year life

  • Field regenerable for up to 10 year life

  • Improved process equipment perfomance

  • Optional built-in 0.003 m filter (PF type)

  • High Flow - up to 2500 slpm

  • Lowest cost (initial and operating)

APPLICATIONS

NuPure's  Optics™ OA Gas Purifier is designed to purify CDA, Inerts (e.g. Nitrogen or Helium), O2, and O2/Inert gas mixtures. It reduces hydrocarbons and other gaseous impurities commonly found in N2 and CDA to PPT levels using room temperature operation. The Optics OA is ideally suited to purifying gases for lens purging. 

The NuPure®  Optics™ OA contains a new proprietary combination of non-reactive inorganic absorber media containing no hydrocarbons or sulfur compounds. Because the Optics™ OA does not react with oxygen, complicated temperature sensing equipment is not required, and because no heat is generated during our purification process, the Optics™ OA purifier can be located at the point-of-use with no effect on temperature sensitive processes.

The  NuPure Optics™ OA gas purifiers come in standard size ranges from 0 to 2500 slpm. The use of optional factory-installed inlet isolation valve is recommended for  elimination of possible operator error during installation.

 

  • Photolithography

  • Lens Purging

  • Removal of hydrocarbons

  • Removal of sulfur compounds

  • Manufacturing of flat panel displays

  • Metrology

 

IMPURITIES REMOVED1

Version

SO2/SOx

H2S

Toluene

CO/CO2

NH3

H2O

NMHCs

Particles

PF or XL

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

 0.003 m or 1 m 

1 - Removes: acid gases, alcohols, amines, ammonia, CO/CO2, hydrocarbons, H2O, H2S, NOx, SO2, SOx, siloxanes and toluene

 Dimensional and Performance Specifications

Dimensional and Performance Specifications Dimensional and Performance Specifications Dimensional and Performance Specifications
Dimensional and Performance Specifications Dimensional and Performance Specifications Dimensional and Performance Specifications

 Purifier Model

A
in  (mm)
B
in  (mm)
C
in  (mm)

Particle Filtration Level

Max Flow @90 psig

Part Number

Mini OA

3.3   (84)

1.5   (38) 1.0   (25)

0.003 m* or 1 m

4 slpm 

00040-OA-VR4-PF1 or XL
100 OA 3.3   (84) 1.5   (38) 1.5   (38)

0.003 m* or 1 m

12 slpm 

00100-OA-VR4-PF1 or XL
200 OA

4.8   (122)

3.0   (76) 1.5   (38) 0.003 m* or 1 m

25 slpm 

00200-OA-VR4-PF1 or XL
600 OA

6.3   (160)

4.5   (114) 2.0   (51) 0.003 m* or 1 m

 75 slpm 

00600-OA-VR4-PF1 or XL
1000 OA

8.8   (224)

7.0   (178) 2.0   (51) 0.003 m* or 1 m 125 slpm 01000-OA-VR4-PF1or XL
1200 OA 7.9   (202) 6.1   (156) 2.5   (63) 0.003 m* or 1 m 350 slpm  01200-OA-VR4-PF1or XL
2000 OA 12.5   (317) 10.7   (272) 2.5   (63) 0.003 m* or 1 m 250 slpm  02000-OA-VR4-PF1 or XL
3000 OA 17.3   (439) 15.5   (394) 3.0   (76) 0.003 m* or 1 m 375 slpm 03000-OA-VR4-PF1 or XL
3000 OA 17.7   (449) 15.6   (396) 3.0  (76) 0.003 m* or 1 m 500 slpm 03000-OA-VR2-PF1 or XL
10000 OA2 24.9   (632) 22.8   (579) 4.0  (101) 0.003 m* or 1 m 1200 slpm 10000-OA-VR2-PF1 or XL
15000 OA2 24.9   (632)) 22..8   (579) 5.0  (127) 0.003 m* or 1 m 1800 slpm 15000-OA-VR2-PF1 or XL
25000 OA2 24.9   (632) 22.8   (570) 6.0  (152) 0.003 m* or 1 m 2500 slpm 25000-OA-VR2-PF1 or XL
Maximum Pressure 250 psig (USA) / 9.9 kg/cm2G (Japan) Materials  316L SS (< 10Ra EP) 
Operating Temperature Room Temperature Fittings    1/4" MVCR3 available on sizes Mini-3000
Leak Rate < 2 x 10-9 atm cc/sec He   1/2" MVCR3 available on sizes 3000-25000
1 - Sub-micron filtration only with PF version.
2 - For models 10000 and larger - the printed dimensions are subject to future change. Please check with factory prior ordering.
3 - VCR-compatible fittings standard. VCR is Registered Trademark of Cajon Corp. Special fittings on request.

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