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Optics™ OAG
Room Temperature Purifier for Optics Purge Gases 

 

Nupure Optics model 60 OAG
FEATURES

 

  • Removal of impurities to < 0.5 ppb1

  • Removes all hydrocarbons, including CH4

  • No heaters or power required

  • Room-temperature operation

  • 316L SS (<10 Ra EP) vessel

  • Factory regenerable for up 10 year life

  • Field regenerable for up to 10 year life

  • Improved process equipment perfomance

  • Optional built-in 0.003 m filter (PF type)

  • High Flow - up to 2500 slpm

  • Low cost (initial and operating)

APPLICATIONS

NuPure's  Optics™ OAG Gas Purifier is designed to purify CDA, Inerts (e.g. Nitrogen or Helium), O2, and O2/Inert gas mixtures. It removes all hydrocarbons (including methane) and other gaseous impurities commonly found in purge gases to PPT levels using room temperature operation. The Optics OAG is ideal for the most critical applications in lens purging. 

The NuPure®  Optics™ OAG contains a new proprietary combination of non-reactive inorganic absorber media and oxygen-stabilized metal getter (patent pending). It contains no hydrocarbons or sulfur compounds. Because the Optics™ OAG does not react with oxygen, complicated temperature sensing equipment is not required, and it can be located at the point-of-use with no effect on temperature sensitive processes.

The  NuPure Optics™ OAG gas purifiers come in standard size ranges from 0 to 2000 slpm. The use of optional factory-installed inlet isolation valve is recommended for elimination of possible operator error during installation.

 

  • Photolithography

  • Lens Purging

  • Removal of hydrocarbons

  • Removal of sulfur compounds

  • Manufacturing of flat panel displays

  • Metrology

 

IMPURITIES REMOVED1

Version

SO2/SOx

Toluene

CO/CO2

NH3

H2O

CH4

NMHCs

Particles

PF or XL

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

< 0.5 ppb

 0.003 m or 1 m 

1 - Removes: acid gases, alcohols, amines, ammonia, CO/CO2, hydrocarbons, H2O, H2S, NOx, SO2, SOx,siloxanes and toluene

 Dimensional and Performance Specifications

Dimensional and Performance Specifications Dimensional and Performance Specifications Dimensional and Performance Specifications
Dimensional and Performance Specifications Dimensional and Performance Specifications Dimensional and Performance Specifications

 Purifier Model

A
in  (mm)
B
in  (mm)
C
in  (mm)

Particle Filtration Level

Max Flow

Part Number

Mini OAG

4.5   (114)

2.7   (69) 1.0   (25)

0.003 m1 or 1 m

4 slpm 

00040-OAG-VR4-PF1 or XL
100 OAG 4.5   (114) 2.7   (69) 1.5   (38)

0.003 m1 or 1 m

12 slpm 

00100-OAG-VR4-PF1 or XL
200 OAG

6.0  (152)

4.2  (107) 1.5   (38) 0.003 m1 or 1 m

25 slpm 

00200-OAG-VR4-PF1 or XL
500 OAG

7.9  (202)

6.1  (156) 2.0   (51) 0.003 m1 or 1 m

50 slpm 

00500-OAG-VR4-PF1 or XL
600 OAG

8.2  (208)

6.5  (167) 2.0   (51) 0.003 m1 or 1 m

75 slpm

00600-OAG-VR4-PF11 or XL
1000 OAG2

12.9  (328)

11.1  (282) 2.0   (51) 0.003 m1 or 1 m 125 slpm  01000-OAG-VR4-PF1 or XL
1200 OAG

7.9  (202)

6.1  (156) 3.0   (76) 0.003 m1 or 1 m

150 slpm 

01200-OAG-VR4-PF1 or XL
2000 OAG 17.7 (449) 15.9   (402) 2.5   (63) 0.003 m1 or 1 m 250 slpm  02000-OAG-VR4-PF1 or XL
3000 OAG 17.3  (439) 15.5   (394) 3.0   (76) 0.003 m1 or 1 m 300 slpm  03000-OAG-VR4-PF1 or XL
3000 OAG 17.7   (449) 15.6   (396) 3.0   (76) 0.003 m1 or 1 m 500 slpm 03000-OAG-VR2-PF1 or XL
5000 OAG3 25.3  (643) 23.2   (590) 3.0   (76) 0.003 m1 or 1 m 850 slpm 05000-OAG-VR2-PF1 or XL
10000 OAG3 35.9  (913) 33.8   (860) 4.0  (101) 0.003 m1 or 1 m 1200 slpm 10000-OAG-VR2-PF1 or XL
15000 OAG3 35.9  (913) 33.8   (860) 5.0  (127) 0.003 m1 or 1 m 1800 slpm 15000-OAG-VR2-PF1 or XL
25000 OAG3 35.9  (913) 33.8   (860) 6.0  (152) 0.003 m1 or 1 m 2500 slpm 25000-OAG-VR2-PF1 or XL
Maximum Pressure 250 psig (USA) / 9.9 kg/cm2G (Japan) Materials  316L SS (< 10Ra EP) 
Operating Temperature Room Temperature Fittings    1/4" MVCR4 available on sizes Mini-3000
Leak Rate < 2 x 10-9 atm cc/sec He   1/2" MVCR4 available on sizes 600-25000

1 - Sub-micron filtration only with PF version.

2 - For model 1000 dimension A have changed from 12.1 inches to 12.9 inches, dimension B has changed from 10.3 inches to 11.1 inches.

3 - For models 5000 and larger - the printed dimensions are subject to future change. Please check with factory prior ordering.

4 - VCR-compatible fittings standard. VCR is Registered Trademark of Cajon Corp. Special fittings on request.

 

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