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UltraPure™ PF Series™
Point-of-Use UHP Gas Purifiers

 

UltraPure™ PF Series™
FEATURES
 
  • Purifier / Particle Filter combination
  • Improves equipment performance and process economy
  • Sub-ppb removal of impurities from Inert Gases, Nitrogen, Hydrogen, Acid Gases, Oxygen and Hydride Specialty Gases
  • Integral 0.003Ám Sintered Stainless Steel Filter Media (9 log reduction)
  • 316L stainless steel (< 10Ra) or 316L VAR (< 5Ra) electropolished wetted surface finish
  • Optional Hastelloy C-22 filter media / housing or Nickel filter media
  • In-Situ regeneration and bakeable to 450o C
APPLICATIONS
 
  • Semiconductor Industry

  • High Purity Welding

  • Gas Analyzer Carts

  • Analytical Industry

  • Research and Development

  • Gas Bottle Filling Plants


The PF Series™ Purifier-Filter reduces gaseous impurities, H
2O, O2, CO, N2, CO2, CH4 and (H2)1 to sub-ppb levels from Inert Gases, Hydrogen and Hydrides, Acid Gases and Oxygen, and includes filtration to 0.003 Ám in one single unit.

The PF Series™ gas purifiers come in a standard range of 0 - 100 slpm. High flow purifier units (XL-Series) are available for components sets and bulk purifier systems.

High pressure purifiers (max 3000 psig) available upon request, are ideal for gas bottle filling plants and other similar high pressure applications.

 

LISTING OF GASES PURIFIED / FILTERED

Inert Gases

Hydrogen & Hydrides

Acid Gases

Oxygen

Impurities Removed

H2O, O2, CO, CO2, H21 (N2, CH4)2

Impurities Removed

H2O, O2, CO2, CO (N2) 3

Impurities Removed

H2O

Impurities Removed

H2O, CO2(H2, CO, CH4)4

Ar

Ar/CH4

He

CH4

Ne

CF4
Kr CCL4
Xe SF6
N2 Freons
H2 As/H3
Ar/H2 PH3
N2/H2 NH3
SiH4 B2H6
Si2H6 H2Se
D.C.S. GeH4
HBr
HCl
BCL3
BF3
CL2
HF
O2
Air
N20
 
 
 
1 -
Only with purchase of - H model.
2 -
Additional impurities removed from He, Ne, Ar, Kr, Xe, & N2 only, using heated getter.
3 -
Additional impurities removed from Hydrogen only, using heated getter.
4 -
Only with purchase of optional heated catalyst.
 

Dimensional and Performance Specifications

diagram

Model

A
in (mm)
B
in (mm)
C
in (mm)
Average Flows (slpm)1 for 1 year lifetime (removal of impurities per chart page 1)
Max Flow (slpm)@ 150 psig PF Series
Max Flow (slpm)@ 150 psig XL Series Room Temperature
Mini PF
3.3" (84)
1.5" (38)
1.0" (25)
0.3
1.5
4.5
100 PF
3.3" (84)
1.5" (38)
1.5" (38)
1
5
15
200 PF
4.8" (122)
3.0" (76)
1.5" (38)
2
10
30
600 PF
6.3" (160)
4.5" (114)
2.0" (51)
6
30
90
1000 PF
8.8" (224)
7.0" (178)
2.0" (51)
10
50
150
200 PF
12.5" (317)
10.7" (272)
2.5" (63)
20
100
300
Maximum Pressure 250 psig (USA) /9.9 kg/cm2G (Japan) Materials 316L S.S. (< 10Ra) or 316L VAR (< 5Ra)
Operating Temperature Room Temperature or 375 - 450o C Fittings 1/4" VCR2/Compression Tubing
Leak Rate < 2 x 10-10 atm cc/sec He Gas Inlet VLSI grade (99.9995% nominal)1
1 -
Lifetime is inversely proportional to the total inlet impurity level and to the average flow. Lifetime for H2O/O2 removal only using getter purifiers is approx 4 years at the stated flows / inlet gas. Room temperature getter purifiers will require periodic regeneration to achieve this total lifetime.
2 -
VCR compatible fitting standard. VCR® is a registered trademark of Cajon Corporation.


UltraPure™XL Series

The XL Series of Gas Purifiers are available in the above dimensions for applications requiring < 1 ppb with high flow performance. For Semiconductor Applications, a sub-micron filter should be installed downstream of the purifier. See NuPure Metal and Ceramic Filter data sheet for a full selection of Gas Particle Filters.

 

UltraPure™ Standard Series

The Standard Series of Gas Purifiers are available in the above dimensions. They are recommended for Industrial, Research and Analytical applications requiring <10 ppb with high flow performance.
 

For regeneration, and for applications requiring removal of all impurities, an external band heater, digital temperature controller with solid state relay and thermal insulation blanket is recommended.

 

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